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ICP Dry Etching of III-V Nitrides

✍ Scribed by Vartuli, C. B.; Lee, J. W.; MacKenzie, J. D.; Donovan, S. M.; Abernathy, C. R.; Pearton, S. J.; Shul, R. J.; Constantine, C.; Barrati, C.; Katz, A.

Book ID: 115492360
Publisher: Cambridge University Press
Year: 1997
Weight: 321 KB
Volume: 468
Category: Article
ISSN: 0272-9172
DOI: 10.1557/proc-468-393

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