Hydrogenated amorphous silicon germanium alloy with enhanced photosensitivity prepared by plasma enhanced chemical vapor deposition at high temperature

✍ Scribed by Yan, Baojun; Zhao, Lei; Zhao, Bending; Chen, Jingwei; Wang, Guanghong; Diao, Hongwei; Mao, Yanli; Wang, Wenjing

• Book ID: 123467277
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 634 KB
• Volume: 89
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/j.vacuum.2012.09.004