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Hydrogen-terminated Si(100) surfaces investigated by reflectance anisotropy spectroscopy

✍ Scribed by A.B. Müller; F. Reinhardt; U. Resch; W. Richter; K.C. Rose; U. Rossow

Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
402 KB
Volume
233
Category
Article
ISSN
0040-6090

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We report reflectance anisotropy spectroscopy (RAS) results for the controlled dosing of atomic hydrogen onto a clean 3 offcut Si(001)±(1 Â 2) sample, cut so as to expose a single domain under ultra-high vacuum (UHV) conditions. Upon dosing approximately 0.8 monolayers of atomic hydrogen onto this s