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Hydrogen induced voids in hydrogenated amorphous silicon carbon (a-SiC:H): Results of effusion and diffusion studies

✍ Scribed by Rosari Saleh; Lusitra Munisa; Wolfhard Beyer

Book ID: 108060136
Publisher: Elsevier Science
Year: 2007
Tongue: English
Weight: 674 KB
Volume: 253
Category: Article
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2006.12.013

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