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Hydrogen incorporation in CNx films deposited by ECR chemical vapor deposition

✍ Scribed by Camero, M.; Gago, R.; Gómez-Aleixandre, C.; Albella, J.M.


Book ID
123560337
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
102 KB
Volume
12
Category
Article
ISSN
0925-9635

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