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Hydrogen content of amorphous PECVD SiNx:H films by infrared spectroscopy and hydrogen forward scattering results

✍ Scribed by Giuliana Morello

Book ID: 115990377
Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 293 KB
Volume: 187
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(95)00155-7

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