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Compositional analysis of amorphous SiNx: H films by ERDA and infrared spectroscopy

✍ Scribed by W. Bohne; W. Fuhs; J. Röhrich; B. Selle; G. González-Díaz; I. Mártil; F. L. Martínez; A. del Prado

Publisher: John Wiley and Sons
Year: 2000
Tongue: English
Weight: 146 KB
Volume: 30
Category: Article
ISSN: 0142-2421
DOI: 10.1002/1096-9918(200008)30:1<534::aid-sia832>3.0.co;2-c

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