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Hydrogen analysis in quartz crystals and quartz glasses by secondary ion mass spectrometry

โœ Scribed by Hisayoshi Yurimoto; Masanori Kurosawa; Shigeho Sueno


Book ID
118885931
Publisher
Elsevier Science
Year
1989
Tongue
English
Weight
546 KB
Volume
53
Category
Article
ISSN
0016-7037

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## Abstract For the analysis of hydrogen and helium in solids and thin films by secondary ion mass spectrometry, the use of Cs^+^ primary ions in conjunction with the detection of HCs^+^ and HeCs^+^ molecular ions is proposed. For both species, detection limits of the order of 10^19^ atoms cm^โˆ’3^ a