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Failure analysis of liquid crystal display panel by time-of-flight secondary ion mass spectrometry

✍ Scribed by S Miyaki; A Yoshida; Y Yamamoto; K Takeuchi


Book ID
108417879
Publisher
Elsevier Science
Year
2003
Tongue
English
Weight
429 KB
Volume
203-204
Category
Article
ISSN
0169-4332

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## Abstract Time of flight secondary ion mass spectrometry (ToF‐SIMS) is an ideal technique for the analysis of adsorbed protein films because of its surface sensitivity and chemical specificity. In this study, we examined ToF‐SIMS with the multivariate calibration method partial least squares regr