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Humidity sensors using porous silicon layer with mesa structure

✍ Scribed by Kim, Seong-Jeen; Park, Jae-Yoon; Lee, Sang-Hoon; Yi, Seung-Hwan

Book ID
121706250
Publisher
Institute of Physics
Year
2000
Tongue
English
Weight
315 KB
Volume
33
Category
Article
ISSN
0022-3727

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## Abstract One‐dimensional photonic crystals constructed from multilayered stacks of porous Si are used as sensors for gas‐phase volatile organic compounds (VOCs). The ability of a double‐stack structure to provide compensation for drift due to changing relative humidity (RH) is investigated. In t