Effects of surface disorder on the surfa
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Tetsuya Narushima; Akiko N Itakura; Takayuki Kurashina; Takaya Kawabe; Masahiro
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Article
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2000
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Elsevier Science
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English
โ 240 KB
We have studied the effects of disorder on surface stress during oxidation. The surface stress change during ion ลฝ . bombardment and the following plasma oxidation on Si 100 was measured by means of an optical microcantilever technique. We have found compressive stress on Si surface due to disorder