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Intitial Oxidation of Si(100) Surface at Cryogenic Temperature

✍ Scribed by Souda, Ryutaro

Book ID: 127366993
Publisher: American Chemical Society
Year: 2013
Tongue: English
Weight: 941 KB
Category: Article
ISSN: 1932-7447
DOI: 10.1021/jp404817f

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