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Effects of surface hydrogen on the air oxidation at room temperature of HF-treated Si (100) surfaces

✍ Scribed by Hirashita, N.; Kinoshita, M.; Aikawa, I.; Ajioka, T.

Book ID
120417491
Publisher
American Institute of Physics
Year
1990
Tongue
English
Weight
539 KB
Volume
56
Category
Article
ISSN
0003-6951

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Effects of surface disorder on the surfa
Effects of surface disorder on the surface stress of Si(100) during oxidation
✍ Tetsuya Narushima; Akiko N Itakura; Takayuki Kurashina; Takaya Kawabe; Masahiro 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 240 KB

We have studied the effects of disorder on surface stress during oxidation. The surface stress change during ion Ž . bombardment and the following plasma oxidation on Si 100 was measured by means of an optical microcantilever technique. We have found compressive stress on Si surface due to disorder