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HRBS/channeling studies of ultra-thin ITO films on Si

✍ Scribed by P. Malar; T.K. Chan; C.S. Ho; T. Osipowicz

Publisher: Elsevier Science
Year: 2008
Tongue: English
Weight: 153 KB
Volume: 266
Category: Article
ISSN: 0168-583X
DOI: 10.1016/j.nimb.2007.11.022

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