The fracture of single crystal gallium arsenide (GaAs) semi-conducting wafers was studied. Prismatic beam specimens, cut at different crystallographic orientations from thin wafers, were loaded to failure in four-point bending. Fracture in these crystals occurred predominantly on the { 1 IO} family
β¦ LIBER β¦
How gallium arsenide wafers are made
β Scribed by Minoru Kitsunai; Takayoshi Yuki
- Publisher
- John Wiley and Sons
- Year
- 1994
- Tongue
- English
- Weight
- 501 KB
- Volume
- 8
- Category
- Article
- ISSN
- 0268-2605
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