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How gallium arsenide wafers are made

✍ Scribed by Minoru Kitsunai; Takayoshi Yuki


Publisher
John Wiley and Sons
Year
1994
Tongue
English
Weight
501 KB
Volume
8
Category
Article
ISSN
0268-2605

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The determination of small variations in the stoichiometry of undoped, semi-insulating gallium arsenide can be achieved by using constant current coulometly. Samples taken from a wafer are etched in HF, dissolved in NaOH-peroxide solution, then treated with a citric acid buffer. To convert the arsen