𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Hot embossing of microfluidic platform

✍ Scribed by Rean-Der Chien


Book ID
103830976
Publisher
Elsevier Science
Year
2006
Tongue
English
Weight
434 KB
Volume
33
Category
Article
ISSN
0735-1933

No coin nor oath required. For personal study only.

✦ Synopsis


Microfabrications of polymer are becoming increasingly important and considered as a low-cost alternative to the silicon or glass-based MEMS technologies. However, most of hot embossing studies were done on a thin film that may not fulfill the structure requirement of the product. In this study, micromolding via hot embossing was applied to microfeatured fluidic platform. The microfeature in the Ni-Co-based stamp includes microchannel array of approximately 27 ΞΌm in depth and 110 ΞΌm in width. A PMMA film of 1 mm thickness was utilized as molding substrate. Effect of molding conditions on the replication accuracy of microfeatures was investigated. The imprint width, imprint depth and sidewall draft angle of microchannels were analyzed and correlated. It was found that all the accuracies of the imprint depth, width and draft angle increase with the applied force until the associated dimensions reach saturated values. Embossing temperature shows similar influence on the accuracies of imprint depth and width as the applied force. Basically, 20kN applied force and 180Β°C embossing temperature can achieve acceptable results considering reasonable cycle time. However, if the applied force is increased to 25 kN accompanied with 200Β°C embossing temperature and 5 min embossing time, one can obtain a nearly perfect replication.


πŸ“œ SIMILAR VOLUMES