✦ LIBER ✦
Fabrication of micro mold for hot-embossing of polyimide microfluidic platform by using electron beam lithography combined with inductively coupled plasma
✍ Scribed by Sung-Won Youn; Toshihiko Noguchi; Masaharu Takahashi; Ryutaro Maeda
- Publisher
- Elsevier Science
- Year
- 2008
- Tongue
- English
- Weight
- 588 KB
- Volume
- 85
- Category
- Article
- ISSN
- 0167-9317
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