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Process Robustness of Hot Embossing Microfluidic Devices

โœ Scribed by Eusner, Thor; Hale, Melinda; Hardt, David E.


Book ID
120505296
Publisher
The American Society of Mechanical Engineers
Year
2010
Tongue
English
Weight
546 KB
Volume
132
Category
Article
ISSN
1087-1357

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Hot embossing of microfluidic platform
โœ Rean-Der Chien ๐Ÿ“‚ Article ๐Ÿ“… 2006 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 434 KB

Microfabrications of polymer are becoming increasingly important and considered as a low-cost alternative to the silicon or glass-based MEMS technologies. However, most of hot embossing studies were done on a thin film that may not fulfill the structure requirement of the product. In this study, mic