✦ LIBER ✦

Homogeneity measurements of plasma immersion ion-implanted complex-shaped samples

✍ Scribed by T. Höchbauer; W. Ensinger; G. Schrag; J. Hartmann; B. Stritzker; B. Rauschenbach

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Lateral implantation dose measurements o

✍ J. Hartmann; W. Ensinger; R.W. Thomae; H. Bender; A. Königer; B. Stritzker; B. R 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 413 KB

Annealing effects in samples of silicon

✍ J.C.N. Reis; A.F. Beloto; M. Ueda 📂 Article 📅 2005 🏛 Elsevier Science 🌐 English ⚖ 206 KB

Studies on treatment homogeneity of plas

✍ K Volz; A Hasse; W Ensinger 📂 Article 📅 2001 🏛 Elsevier Science 🌐 English ⚖ 147 KB

Reflectance Measurements of Annealed Por

✍ A.F. Beloto; M.D. Silva; J.R. Senna; C. Kuranaga; N.F. Leite; M. Ueda 📂 Article 📅 2002 🏛 John Wiley and Sons 🌐 English ⚖ 140 KB 👁 2 views

Thin film oxides as probe for homogeneit

✍ W Ensinger; K Volz 📂 Article 📅 2000 🏛 Elsevier Science 🌐 English ⚖ 131 KB

Investigation of plasma immersion ion im

✍ A. Königer; W. Ensinger; C. Hammerl; T. Höchbauer; G. Schrag; J. Hartmann; R.W. 📂 Article 📅 1996 🏛 Elsevier Science 🌐 English ⚖ 376 KB