✦ LIBER ✦
Thin film oxides as probe for homogeneity measurements of 3-dimensional objects treated by plasma immersion ion implantation
✍ Scribed by W Ensinger; K Volz
- Book ID
- 114171768
- Publisher
- Elsevier Science
- Year
- 2000
- Tongue
- English
- Weight
- 131 KB
- Volume
- 166-167
- Category
- Article
- ISSN
- 0168-583X
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