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HiPIMS Ion Energy Distribution Measurements in Reactive Mode

✍ Scribed by Jouan, Pierre-Yves; Le Brizoual, Laurent; Ganciu, Mihaï; Cardinaud, Christophe; Tricot, Sylvain; Djouadi, Mohamed-Abdou


Book ID
118065574
Publisher
IEEE
Year
2010
Tongue
English
Weight
656 KB
Volume
38
Category
Article
ISSN
0093-3813

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