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Angular-resolved energy flux measurements of a dc- and HIPIMS-powered rotating cylindrical magnetron in reactive and non-reactive atmosphere
✍ Scribed by Leroy, W P; Konstantinidis, S; Mahieu, S; Snyders, R; Depla, D
- Book ID
- 121434492
- Publisher
- Institute of Physics
- Year
- 2011
- Tongue
- English
- Weight
- 529 KB
- Volume
- 44
- Category
- Article
- ISSN
- 0022-3727
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