High-resolution scanning capacitance mic
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Filippo Giannazzo; Vito Raineri; Vittorio Privitera; Francesco Priolo
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Article
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2001
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Elsevier Science
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English
⚖ 141 KB
Scanning capacitance microscopy was performed on bevelled samples to improve the resolution. The dependence of the reverse junction carrier spilling on the bevel angle has been investigated for P and B ion-implanted Si samples. We show an increase of this effect decreasing the bevel angle from 5844