Highly uniform large-area a-Si:H films

✍ Scribed by M.S. Sanematsu; I. Pereyra; A.M. Andrade; R.F.P. Martins

• Publisher: Elsevier Science
• Year: 1985
• Weight: 278 KB
• Volume: 14
• Category: Article
• ISSN: 0379-6787
• DOI: 10.1016/0379-6787(85)90063-8

✦ Synopsis

Summ~"

A double-chamber system was used to deposit large-area hydrogenated amorphous silicon films for photovoltaic applications. The electro-optical characterisation of films of area 400 cm 2 deposited on glass substrates is described in this paper. The deposition rate of the films is dependent on the r.f. power delivered, the substrate bias and the partial pressure of the reactive gas. The film thickness was observed to have a uniformity of better than 0.5%. The best film quality was obtained for a deposition rate of about 1.5 A s -~. The optical gap, activation energy, photosensitivity, density of gap states and hydrogen content were determined.