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High rate PECVD of a-Si alloys on large areas

✍ Scribed by S. Röhlecke; R. Tews; A. Kottwitz; K. Schade

Publisher: Elsevier Science
Year: 1995
Tongue: English
Weight: 352 KB
Volume: 74-75
Category: Article
ISSN: 0257-8972
DOI: 10.1016/0257-8972(95)08234-4

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