✦ LIBER ✦
Engineering of the energy coupling in PECVD systems used to produce large area a-Si:H coatings
✍ Scribed by R Martins; I Ferreira
- Publisher
- Elsevier Science
- Year
- 1994
- Tongue
- English
- Weight
- 210 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0042-207X
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