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Large-area uniform evaporated thin films

✍ Scribed by JV Ramsay; RP Netterfield; EGV Mugridge


Publisher
Elsevier Science
Year
1974
Tongue
English
Weight
516 KB
Volume
24
Category
Article
ISSN
0042-207X

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Highly uniform large-area a-Si:H films
✍ M.S. Sanematsu; I. Pereyra; A.M. Andrade; R.F.P. Martins πŸ“‚ Article πŸ“… 1985 πŸ› Elsevier Science βš– 278 KB

## Summ~" A double-chamber system was used to deposit large-area hydrogenated amorphous silicon films for photovoltaic applications. The electro-optical characterisation of films of area 400 cm 2 deposited on glass substrates is described in this paper. The deposition rate of the films is dependen