## Abstract GaβSnβZnβO (GTZO) thin films were prepared on glass substrates at 100βΒ°C by coβsputtering of Gaβdoped ZnO and SnO~2~ targets. Characteristic properties of the films were investigated with varying oxygen gas content in the sputtering ambient. Whereas amorphous GTZO films were prepared wi
Highly transparent solution processed In-Ga-Zn oxide thin films and thin film transistors
β Scribed by Y. Wang; S. W. Liu; X. W. Sun; J. L. Zhao; G. K. L. Goh; Q. V. Vu; H. Y. Yu
- Publisher
- Springer
- Year
- 2010
- Tongue
- English
- Weight
- 413 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0928-0707
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## Abstract We investigated the role of Ga in solutionβprocessed InGaZnO thin film transistors (TFTs). The incorporation of Ga into a InZnO compound system results in a decrease in the carrier concentration of the films and an offβcurrent of TFTs. This is a result of the Ga ions forming stronger ch
prober from SΓSS in a dark environment. An Att/Huber unichiller and a temperature controller were used to set the temperature between 293 K to 423 K. At each temperature step thermal equilibrium was awaited before starting the measurements.