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Highly conductive and transparent Ga-doped epitaxial ZnO films on sapphire by CVD

✍ Scribed by B.M. Ataev; A.M. Bagamadova; A.M. Djabrailov; V.V. Mamedov; R.A. Rabadanov

Book ID
107864427
Publisher
Elsevier Science
Year
1995
Tongue
English
Weight
165 KB
Volume
260
Category
Article
ISSN
0040-6090

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## Abstract Epitaxial ZnO and Al‐doped ZnO (AZO) thin films were grown on (0001)‐sapphire substrates using pulsed laser deposition. The photoluminescence spectrum of the highly conductive (1.3 × 10^3^ S cm^βˆ’1^), as‐grown AZO shows a poor near band edge (NBE) emission (3.30 eV) and no deep level emi