High temperature oxygen sensor based on sputtered cerium oxide
β Scribed by J. Gerblinger; W. Lohwasser; U. Lampe; H. Meixner
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 381 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0925-4005
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π SIMILAR VOLUMES
Catalytic metal gate-silicon dioxide-silicon carbide (MOSiC) capacitors operating to about 800 "C are used as high temperature gas sensor devices. Hydrogen or hydrogen containing molecules, which are dissociated on the catalytic metal surface, create a decrease of the flat band voltage of the MOS ca
Nanostructured ZnO thin film was prepared by DC reactive magnetron sputtering and characterized by X-ray diffraction, SEM, AFM, FT-IR spectroscopy, UV-vis spectroscopy and photoluminescence measurements. Under the conditions employed, the sputtered ZnO film was found to be polycrystalline with grain