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Gallium oxide thin films: A new material for high-temperature oxygen sensors

✍ Scribed by Maximilian Fleischer; Hans Meixner


Publisher
Elsevier Science
Year
1991
Tongue
English
Weight
787 KB
Volume
4
Category
Article
ISSN
0925-4005

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High-dose oxygen implantation of multila
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A high-dose ion implantation technique for the formation of high-temperature superconducting thin films on silicon substrates is investigated. This technique consists of three steps: (1) deposition of a multilayer sample of the appropriate composition, (2) implantation of oxygen to mix the layers an