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High-temperature microhardness of SiGe epitaxial layers grown on Ge and Si substrates

✍ Scribed by Mezhennyi, M V; Mil vidskii, M G; Yugova, T G


Book ID
121017437
Publisher
Institute of Physics
Year
2002
Tongue
English
Weight
162 KB
Volume
14
Category
Article
ISSN
0953-8984

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