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Effect of the sign of misfit strain on the formation of a dislocation structure in SiGe epitaxial layers grown on Si and Ge substrates

✍ Scribed by V. I. Vdovin; M. G. Mil’vidskii; T. G. Yugova


Book ID
110144065
Publisher
SP MAIK Nauka/Interperiodica
Year
2005
Tongue
English
Weight
63 KB
Volume
50
Category
Article
ISSN
1063-7745

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In this paper, the effects of Ge content and profile shape on the performance of a SiGe-based heterojunction bipolar transistor (HBT) are investigated. The common-emitter current gain, the early voltage, and the transit time of SiGe HBTs are calculated and computed for different Ge profiles as well