✦ LIBER ✦
Laser annealing induced high Ge concentration epitaxial SiGe layer in Si1-xGex virtual substrate
✍ Scribed by Ong, C. Y.; Pey, K. L.; Li, X.; Wang, X. C.; Ng, C. M.; Chan, L.
- Book ID
- 111676489
- Publisher
- American Institute of Physics
- Year
- 2008
- Tongue
- English
- Weight
- 597 KB
- Volume
- 93
- Category
- Article
- ISSN
- 0003-6951
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