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High sputtering yields of organic compounds by large gas cluster ions

โœ Scribed by K. Ichiki; S. Ninomiya; Y. Nakata; Y. Honda; T. Seki; T. Aoki; J. Matsuo


Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
445 KB
Volume
255
Category
Article
ISSN
0169-4332

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Measurements of secondary ions emitted f
โœ Satoshi Ninomiya; Yoshihiko Nakata; Kazuya Ichiki; Toshio Seki; Takaaki Aoki; Ji ๐Ÿ“‚ Article ๐Ÿ“… 2007 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 192 KB

We propose to use cluster ions that are much larger than the molecular ions as primary ions for organic secondary ion mass spectrometry. Incident Ar cluster ion beams with energies from 10 to 20 keV and a mean size of about 1000 atoms/cluster were used. Secondary ions were measured for a thin argini