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High yield of multiply charged silicon ions by a pulsed sputter Penning source

✍ Scribed by Y. Sato; H. Ogawa; S. Yamada; T. Yamada; T. Kohno; A. Kitagawa

Publisher: Elsevier Science
Year: 1991
Tongue: English
Weight: 260 KB
Volume: 310
Category: Article
ISSN: 0168-9002
DOI: 10.1016/0168-9002(91)91120-k

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