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High-speed and low-noise AlInN/GaN HEMTs on SiC

✍ Scribed by Sun, Haifeng ;Alt, Andreas R. ;Benedickter, Hansruedi ;Feltin, Eric ;Carlin, Jean-François ;Gonschorek, Marcus ;Grandjean, Nicolas ;Bolognesi, C. R.


Book ID
105366003
Publisher
John Wiley and Sons
Year
2010
Tongue
English
Weight
411 KB
Volume
208
Category
Article
ISSN
0031-8965

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High-efficiency GaN HEMTs on 3-inch semi
✍ Waltereit, P. ;Bronner, W. ;Quay, R. ;Dammann, M. ;Müller, S. ;Kiefer, R. ;Rayno 📂 Article 📅 2008 🏛 John Wiley and Sons 🌐 English ⚖ 358 KB

## Abstract We report on device performance and reliability of our 3″ GaN high electron mobility transistor (HEMT) technology. AlGaN/GaN HEMT structures are grown on semi‐insulating SiC substrates by metal‐organic chemical vapor deposition (MOCVD) with sheet resistance uniformities better than 2%.