High-Resolution X-Ray Scattering from Thin Films and Multilayers

✍ Scribed by Václav Holý, Ullrich Pietsch, Tilo Baumbach (auth.)

• Publisher: Springer Berlin Heidelberg
• Year: 1999
• Tongue: English
• Leaves: 247
• Series: Springer Tracts in Modern Physics 149
• Category: Library

✦ Synopsis

This critical overview presents experimental methods for solving most frequent strucutral problems of mono-crystalline thin films and layered systems:
thickness, crystalline state, strain distribution, interface quality and other properties. A unified theoretical approach based on kinematical and dynamical scattering theories describes the experimental methods. This book is a ready-to-hand reference for experimentalists who want to improve their knowledge on modern x-ray methods for thin-film analysis.

✦ Table of Contents

Basic elements of the equipment....Pages 3-16
Diffractometers and reflectometers....Pages 17-25
Scans and resolution in angular and reciprocal space....Pages 27-40
Basic principles....Pages 43-57
Kinematical scattering theory....Pages 59-79
Dynamical scattering theory....Pages 81-113
Layer thicknesses of single layers and multilayers....Pages 119-149
Lattice parameters and lattice strains in single expitaxial layers....Pages 151-167
Volume defects in layers....Pages 169-189
X-ray reflection by rough multilayers....Pages 191-219
X-ray scattering by gratings and dots....Pages 221-246
A. Wave vectors and amplitudes of the internal wavefields in a dynamically scattering crystal....Pages 247-251

✦ Subjects

Optical Spectroscopy, Ultrafast Optics; Surfaces and Interfaces, Thin Films; Crystallography