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High-resolution x-ray diffraction for characterization and monitoring of silicon-on-insulator fabrication processes

✍ Scribed by Cohen, G. M.; Mooney, P. M.; Park, H.; Cabral, C.; Jones, E. C.

Book ID: 120250892
Publisher: American Institute of Physics
Year: 2003
Tongue: English
Weight: 866 KB
Volume: 93
Category: Article
ISSN: 0021-8979
DOI: 10.1063/1.1527217

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