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High resolution thickness and interface roughness characterization in multilayer thin films by grazing incidence X-ray reflectivity

✍ Scribed by Isao Kojima; Boquan Li; Toshiyuki Fujimoto

Book ID: 114086847
Publisher: Elsevier Science
Year: 1999
Tongue: English
Weight: 144 KB
Volume: 355-356
Category: Article
ISSN: 0040-6090
DOI: 10.1016/s0040-6090(99)00544-1

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