High-Resistivity Thin-Film Resistors Grown Using –Si–SiC Materials by Radio-Frequency Magnetron Sputtering

✍ Scribed by Kyoung-Woo Park; Sung-Gi Hur; Jun-Ku Ahn; Nak-Jin Seong; Soon-Gil Yoon

• Book ID: 114619973
• Publisher: IEEE
• Year: 2010
• Tongue: English
• Weight: 704 KB
• Volume: 57
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/ted.2010.2045673