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[IEEE 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Wuhan (2009.12.17-2009.12.20)] 2009 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA 2009) - Properties of high velocity ZnO thin films for saw devices grown by radio frequency magnetron sputtering

✍ Scribed by Xu-ming Bian, ; Rui Chen, ; Bai-jie Fan, ; Li Li, ; Chun-he He, ; Zi-kun Fan,

Book ID: 120171093
Publisher: IEEE
Year: 2009
Weight: 512 KB
Category: Article
ISBN: 1424449502
DOI: 10.1109/SPAWDA.2009.5428948

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