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High-rate pulsed reactive magnetron sputtering of oxide nanocomposite coatings

✍ Scribed by Musil, Jindrich; Baroch, Pavel

Book ID: 120508701
Publisher: Elsevier Science
Year: 2013
Tongue: English
Weight: 942 KB
Volume: 87
Category: Article
ISSN: 0042-207X
DOI: 10.1016/j.vacuum.2012.02.023

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