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High rate photochemical deposition of amorphous silicon from higher silanes

✍ Scribed by A.E. Delahoy

Book ID: 118333509
Publisher: Elsevier Science
Year: 1985
Tongue: English
Weight: 164 KB
Volume: 77-78
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(85)90789-6

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