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High-quality polycrystalline silicon thin film prepared by a solid phase crystallization method

✍ Scribed by T. Matsuyama; N. Terada; T. Baba; T. Sawada; S. Tsuge; K. Wakisaka; S. Tsuda

Book ID: 115991117
Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 387 KB
Volume: 198-200
Category: Article
ISSN: 0022-3093
DOI: 10.1016/0022-3093(96)00091-9

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