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High-purity refractory metals and silicides for microelectronic applications

✍ Scribed by R. Huenert; G. Winter; W. Kiliani; D. Greifendorf

Book ID: 113302721
Publisher: Elsevier Science
Year: 1992
Tongue: English
Weight: 584 KB
Volume: 11
Category: Article
ISSN: 0263-4368
DOI: 10.1016/0263-4368(92)90086-h

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