High purity refractory metals and silicides for microelectronic application: R. Huenert et al (H.C. Starck GmbH, Goslar, Germany) Int J Refractory Metals & Hard Materials, Vol 11, No 6, 1992, 331–335

• Book ID: 116034064
• Publisher: Elsevier Science
• Year: 1994
• Tongue: English
• Weight: 139 KB
• Volume: 49
• Category: Article
• ISSN: 0026-0657
• DOI: 10.1016/0026-0657(94)91898-8