High performance platinum-silicided p-type Schottky barrier metal-oxide-semiconductor field-effect transistors scaled down to 30 nm

✍ Scribed by Jun, Myungsim; Park, Youngsam; Hyun, Younghoon; Zyung, Taehyoung; Jang, Moongyu; Choi, Sung-Jin

• Book ID: 124070285
• Publisher: AVS (American Vacuum Society)
• Year: 2011
• Tongue: English
• Weight: 550 KB
• Volume: 29
• Category: Article
• ISSN: 1520-8567
• DOI: 10.1116/1.3592483