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High-lifetime strained Si1-xGex films grown by rapid thermal chemical vapor deposition

✍ Scribed by J.C. Sturm; P.V. Schwartz; H. Manoharan; X. Xiao; Q. Mi


Book ID
118414993
Publisher
Elsevier Science
Year
1992
Tongue
English
Weight
317 KB
Volume
33
Category
Article
ISSN
0924-4247

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