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High Index Resist for 193 nm Immersion Lithography

✍ Scribed by Matsumoto, Kazuya; Costner, Elizabeth A.; Nishimura, Isao; Ueda, Mitsuru; Willson, C. Grant

Book ID: 121827063
Publisher: American Chemical Society
Year: 2008
Tongue: English
Weight: 996 KB
Volume: 41
Category: Article
ISSN: 0024-9297
DOI: 10.1021/ma800295s

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